Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10509336 | Optical assembly having a thermally conductive component | Franz Sorg, Ralf Winter, Karl-Stefan Weissenrieder | 2019-12-17 |
| 10281824 | Microlithography projection objective | Heiko Feldmann, Daniel Kraehmer, Jean-Claude Perrin, Aurelian Dodoc, Vladimir Kamenov +4 more | 2019-05-07 |
| 10203607 | Optical element unit for exposure processes | Tilman Schwertner, Ulrich Bingel, Guido Limbach, Hans-Juergen Scherle, Jens Kugler +2 more | 2019-02-12 |