Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10203607 | Optical element unit for exposure processes | Tilman Schwertner, Guido Limbach, Julian Kaller, Hans-Juergen Scherle, Jens Kugler +2 more | 2019-02-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10203607 | Optical element unit for exposure processes | Tilman Schwertner, Guido Limbach, Julian Kaller, Hans-Juergen Scherle, Jens Kugler +2 more | 2019-02-12 |