Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10317802 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2019-06-11 |
| 10203607 | Optical element unit for exposure processes | Tilman Schwertner, Ulrich Bingel, Julian Kaller, Hans-Juergen Scherle, Jens Kugler +2 more | 2019-02-12 |