Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10466598 | Projection exposure apparatus for semiconductor lithography with increased thermal robustness | Alireza AKBARINIA, Alexandre Kemp, Amishkumar Panchal | 2019-11-05 |
| 10317802 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Peter Kuerz +7 more | 2019-06-11 |