Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10466598 | Projection exposure apparatus for semiconductor lithography with increased thermal robustness | Alireza AKBARINIA, Alexandre Kemp, Timo Laufer | 2019-11-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10466598 | Projection exposure apparatus for semiconductor lithography with increased thermal robustness | Alireza AKBARINIA, Alexandre Kemp, Timo Laufer | 2019-11-05 |