Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10317802 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Gero Wittich, Timo Laufer, Peter Kuerz +7 more | 2019-06-11 |
| 10222704 | Method for operating an illumination system of a microlithographic projection exposure apparatus | Frank Schlesener | 2019-03-05 |