Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444631 | Method of operating a microlithographic projection apparatus and illumination system of such an apparatus | Markus Deguenther, Johannes Eisenmenger, Stefanie Hilt, Thomas Korb, Manfred Maul | 2019-10-15 |
| 10222704 | Method for operating an illumination system of a microlithographic projection exposure apparatus | Oliver Natt | 2019-03-05 |