Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444631 | Method of operating a microlithographic projection apparatus and illumination system of such an apparatus | Markus Deguenther, Stefanie Hilt, Thomas Korb, Frank Schlesener, Manfred Maul | 2019-10-15 |
| 10409167 | Method for illuminating an object field of a projection exposure system | Martin Endres, Stig Bieling, Markus Hauf, Lars Wischmeier, Fabian Haacker | 2019-09-10 |
| 10274828 | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | Markus Deguenther, Vladimir Davydenko, Thomas Korb | 2019-04-30 |