Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10398016 | Negative ion-based beam injector | Yuri I. Belchenko, Alexander V. Burdakov, Gennady I. Dimov, Alexandr A. Ivanov, Valeery V. Kobets +4 more | 2019-08-27 |
| 10274828 | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | Markus Deguenther, Thomas Korb, Johannes Eisenmenger | 2019-04-30 |