Issued Patents 2019
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444631 | Method of operating a microlithographic projection apparatus and illumination system of such an apparatus | Johannes Eisenmenger, Stefanie Hilt, Thomas Korb, Frank Schlesener, Manfred Maul | 2019-10-15 |
| 10394129 | Microlithographic illumination unit | Stig Bieling | 2019-08-27 |
| 10281823 | Illumination system of a microlithographic projection exposure apparatus | — | 2019-05-07 |
| 10274828 | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | Vladimir Davydenko, Thomas Korb, Johannes Eisenmenger | 2019-04-30 |
| 10254466 | Optical waveguide for guiding illumination light | Christian Wald, Stefan Schaff, Daniel Runde | 2019-04-09 |
| 10241416 | Illumination system having a beam deflection array for illuminating a mask in a microlithographic projection exposure apparatus | Michael Layh | 2019-03-26 |
| 10216091 | Facet mirror for an illumination optical unit for projection lithography | Michael Patra | 2019-02-26 |
| 10191382 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra, Michael Layh | 2019-01-29 |