Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10409167 | Method for illuminating an object field of a projection exposure system | Martin Endres, Johannes Eisenmenger, Markus Hauf, Lars Wischmeier, Fabian Haacker | 2019-09-10 |
| 10394129 | Microlithographic illumination unit | Markus Deguenther | 2019-08-27 |
| 10324380 | Projection exposure apparatus and method for measuring an imaging aberration | Helmut Haidner | 2019-06-18 |