Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514276 | Sensor device | Ralf Ameling | 2019-12-24 |
| 10459351 | Device for transmitting electrical signals, and lithography apparatus | Jan Horn, Sascha Bleidistel, Florian Bart | 2019-10-29 |
| 10409167 | Method for illuminating an object field of a projection exposure system | Martin Endres, Johannes Eisenmenger, Stig Bieling, Lars Wischmeier, Fabian Haacker | 2019-09-10 |
| 10317802 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2019-06-11 |
| 10303065 | Arrangement for actuating at least one optical element in an optical system | Alexander Vogler | 2019-05-28 |