Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10509325 | Position measurement of optical elements in a lithographic apparatus | Erik Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch, Suzanne Cosijn | 2019-12-17 |
| 10459351 | Device for transmitting electrical signals, and lithography apparatus | Jan Horn, Florian Bart, Markus Hauf | 2019-10-29 |
| 10185221 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Ulrich Schoenhoff, Juergen Fischer | 2019-01-22 |