Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10509325 | Position measurement of optical elements in a lithographic apparatus | Erik Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch, Sascha Bleidistel | 2019-12-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10509325 | Position measurement of optical elements in a lithographic apparatus | Erik Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch, Sascha Bleidistel | 2019-12-17 |