Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10509325 | Position measurement of optical elements in a lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch, Sascha Bleidistel, Suzanne Cosijn | 2019-12-17 |
| 10481500 | Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type | Hans-Juergen Mann, Wilhelm Ulrich, David Shafer | 2019-11-19 |