Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481500 | Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type | Wilhelm Ulrich, Erik Loopstra, David Shafer | 2019-11-19 |
| 10408765 | Magnifying imaging optical unit and EUV mask inspection system with such an imaging optical unit | — | 2019-09-10 |