Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481500 | Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type | Hans-Juergen Mann, Wilhelm Ulrich, Erik Loopstra | 2019-11-19 |
| 10371574 | Detector device for detection of a spectral portion for a microscope | Tiemo Anhut, Matthias Wald | 2019-08-06 |