Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10185221 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Sascha Bleidistel, Juergen Fischer | 2019-01-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10185221 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Sascha Bleidistel, Juergen Fischer | 2019-01-22 |