Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514619 | Sensor arrangement for a lithography system, lithography system, and method for operating a lithography system | Ulrich Bihr, Markus Holz | 2019-12-24 |
| 10459351 | Device for transmitting electrical signals, and lithography apparatus | Sascha Bleidistel, Florian Bart, Markus Hauf | 2019-10-29 |
| 10444633 | Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system | Stefan Krone, Lars Berger | 2019-10-15 |
| 10437155 | Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system | Stefan Krone, Lars Berger | 2019-10-08 |