Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444633 | Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system | Jan Horn, Lars Berger | 2019-10-15 |
| 10437155 | Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system | Jan Horn, Lars Berger | 2019-10-08 |