Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514619 | Sensor arrangement for a lithography system, lithography system, and method for operating a lithography system | Markus Holz, Jan Horn | 2019-12-24 |
| 10261424 | Lithography apparatus and method for operating a lithography apparatus | Udo Dinger, Markus Holz | 2019-04-16 |