Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514608 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Juergen Baier, Daniel Runde, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler +3 more | 2019-12-24 |
| 10514619 | Sensor arrangement for a lithography system, lithography system, and method for operating a lithography system | Ulrich Bihr, Jan Horn | 2019-12-24 |
| 10261424 | Lithography apparatus and method for operating a lithography apparatus | Udo Dinger, Ulrich Bihr | 2019-04-16 |