Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514608 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Daniel Runde, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler, André Orthen +3 more | 2019-12-24 |
| 10386733 | Optical system | Rolf Freimann, Steffen Fritzsche | 2019-08-20 |
| 10345547 | Method for producing a lens for a lithography apparatus, and measurement system | Steffen Fritzsche, Rolf Freimann | 2019-07-09 |