Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514608 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Juergen Baier, Daniel Runde, Ulrich Mueller, Joerg Lichtenthaeler, André Orthen +3 more | 2019-12-24 |
| D863226 | Electrical junction box for motor diagnosis | Jan Andersson, Stephan Hühne | 2019-10-15 |