Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514608 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Juergen Baier, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler, André Orthen +3 more | 2019-12-24 |
| 10254466 | Optical waveguide for guiding illumination light | Christian Wald, Stefan Schaff, Markus Deguenther | 2019-04-09 |
| 10209620 | Illumination system for EUV projection exposure apparatus, EUV projection exposure apparatus including illumination system and method for operating an EUV projection exposure apparatus | Christoph Petri | 2019-02-19 |