Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10254466 | Optical waveguide for guiding illumination light | Stefan Schaff, Markus Deguenther, Daniel Runde | 2019-04-09 |
| 10241423 | Method of operating a projection exposure tool for microlithography | Olaf Conradi, Michael Totzeck, Ulrich Loering, Dirk Juergens, Ralf Mueller | 2019-03-26 |