Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10386733 | Optical system | Juergen Baier, Steffen Fritzsche | 2019-08-20 |
| 10359703 | Method for aligning a mirror of a microlithographic projection exposure apparatus | Bernd Doerband, Jochen Hetzler | 2019-07-23 |
| 10345547 | Method for producing a lens for a lithography apparatus, and measurement system | Steffen Fritzsche, Juergen Baier | 2019-07-09 |