Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10502545 | Measuring method and measuring arrangement for an imaging optical system | Ulrich Wegmann, Hans-Michael Stiepan | 2019-12-10 |
| 10422718 | Test device and method for testing a mirror | Hans-Michael Stiepan, Sebastian Fuchs | 2019-09-24 |
| 10359703 | Method for aligning a mirror of a microlithographic projection exposure apparatus | Rolf Freimann, Bernd Doerband | 2019-07-23 |
| 10337850 | Interferometric measuring arrangement | Sebastian Fuchs, Hans-Michael Stiepan, Karl-Heinz Schuster | 2019-07-02 |
| 10303068 | Projection exposure tool for microlithography and method for microlithographic imaging | Aksel Goehnermeier | 2019-05-28 |