Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495441 | Probing element and coordinate measuring machine for measuring at least one measurement object | Ferdinand Bader, Dietrich Imkamp | 2019-12-03 |
| 10345570 | Device for optical examination of a specimen, method for examining a specimen and method for transferring a device into an operation-ready state | Wolfgang Singer, Guenter Rudolph, Johannes Ruoff, Christian Dietrich, Rong Dong | 2019-07-09 |
| 10309765 | Coordinate measuring machine having an improved optical sensing system and related method | Dominik Seitz, Frank Widulle, Philipp Jester, Christoph Graf Vom Hagen, Andreas Ebser +1 more | 2019-06-04 |
| 10303068 | Projection exposure tool for microlithography and method for microlithographic imaging | Jochen Hetzler | 2019-05-28 |
| 10209411 | Multilayer mirror | Gisela Von Blanckenhagen | 2019-02-19 |