Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10386297 | Method and apparatus for examining an element of a photolithographic mask for the EUV range | Jörg Frederik Blumrich | 2019-08-20 |
| 10345570 | Device for optical examination of a specimen, method for examining a specimen and method for transferring a device into an operation-ready state | Wolfgang Singer, Aksel Goehnermeier, Guenter Rudolph, Christian Dietrich, Rong Dong | 2019-07-09 |
| 10274649 | Mirror and related EUV systems and methods | Heiko Feldmann | 2019-04-30 |
| 10191386 | Imaging optical unit for EUV projection lithography | Josef Rapp | 2019-01-29 |