Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10386297 | Method and apparatus for examining an element of a photolithographic mask for the EUV range | Johannes Ruoff | 2019-08-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10386297 | Method and apparatus for examining an element of a photolithographic mask for the EUV range | Johannes Ruoff | 2019-08-20 |