Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10281824 | Microlithography projection objective | Daniel Kraehmer, Jean-Claude Perrin, Julian Kaller, Aurelian Dodoc, Vladimir Kamenov +4 more | 2019-05-07 |
| 10274649 | Mirror and related EUV systems and methods | Johannes Ruoff | 2019-04-30 |