Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10509330 | Method and device for characterizing a wafer patterned using at least one lithography step | Andy Zott, Ulrich Mantz | 2019-12-17 |
| 10502545 | Measuring method and measuring arrangement for an imaging optical system | Ulrich Wegmann, Jochen Hetzler | 2019-12-10 |
| 10422718 | Test device and method for testing a mirror | Jochen Hetzler, Sebastian Fuchs | 2019-09-24 |
| 10337850 | Interferometric measuring arrangement | Jochen Hetzler, Sebastian Fuchs, Karl-Heinz Schuster | 2019-07-02 |