Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10502545 | Measuring method and measuring arrangement for an imaging optical system | Hans-Michael Stiepan, Jochen Hetzler | 2019-12-10 |
| 10386728 | Device and method for wavefront analysis | — | 2019-08-20 |
| 10345710 | Microlithographic projection exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster, Ulrich Loering +6 more | 2019-07-09 |