Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10241416 | Illumination system having a beam deflection array for illuminating a mask in a microlithographic projection exposure apparatus | Markus Deguenther | 2019-03-26 |
| 10191382 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther | 2019-01-29 |