Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416570 | Optical imaging arrangement with a piezoelectric device | Stefan Hembacher, Michaela Schmid, Bernhard Geuppert, Burkhard Corves, Martin Riedel +5 more | 2019-09-17 |
| 10345710 | Microlithographic projection exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2019-07-09 |
| 10215948 | Optical element module with minimized parasitic loads | Ulrich Weber, Dirk Schaffer | 2019-02-26 |
| 10203607 | Optical element unit for exposure processes | Tilman Schwertner, Ulrich Bingel, Guido Limbach, Julian Kaller, Hans-Juergen Scherle +2 more | 2019-02-12 |
| 10197925 | Optical module for a microlithography objective holding optical elements with supporting devices located in a non-equidistant manner | Franz Sorg, Yim-Bun Patrick Kwan | 2019-02-05 |