Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416570 | Optical imaging arrangement with a piezoelectric device | Jens Kugler, Michaela Schmid, Bernhard Geuppert, Burkhard Corves, Martin Riedel +5 more | 2019-09-17 |
| 10317802 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2019-06-11 |