Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520838 | Mounting arrangement for an optical imaging arrangement | Jens Prochnau | 2019-12-31 |
| 10215948 | Optical element module with minimized parasitic loads | Jens Kugler, Ulrich Weber | 2019-02-26 |
| 10203607 | Optical element unit for exposure processes | Tilman Schwertner, Ulrich Bingel, Guido Limbach, Julian Kaller, Hans-Juergen Scherle +2 more | 2019-02-12 |