Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109520 | Methods for depositing dielectric barrier layers and aluminum containing etch stop layers | Sree Rangasai V. Kesapragada, Kevin Moraes, He Ren, Mehul Naik, David Thompson +6 more | 2018-10-23 |
| 10002834 | Method and apparatus for protecting metal interconnect from halogen based precursors | Mehul Naik, Paul F. Ma, Tae Hong Ha | 2018-06-19 |
| 9984976 | Interconnect structures and methods of formation | Yana Cheng, Yong Cao, Sree Rangasai V. Kesapragada, Xianmin Tang, Deenesh Padhi | 2018-05-29 |