Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997366 | Silicon oxide silicon nitride stack ion-assisted etch | Zhongkui Tan, Hua Xiang, Wenbing Hu, Qian Fu | 2018-06-12 |
| 9991128 | Atomic layer etching in continuous plasma | Zhongkui Tan, Yiting Zhang, Ying Wu, Qian Fu, Yoko Yamaguchi +1 more | 2018-06-05 |
| 9941178 | Methods for detecting endpoint for through-silicon via reveal applications | Alan J. Miller, Evelio Sevillano, Jorge Luque, Andrew D. Bailey, III | 2018-04-10 |
| 9859127 | Line edge roughness improvement with photon-assisted plasma process | Zhongkui Tan, Qian Fu, Sangjun Park | 2018-01-02 |