Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9859127 | Line edge roughness improvement with photon-assisted plasma process | Zhongkui Tan, Qing Xu, Qian Fu | 2018-01-02 |
SP
Sangjun Park
Overall (2018): #249,634 of 503,207Top 50%
1
Patents 2018