Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997366 | Silicon oxide silicon nitride stack ion-assisted etch | Zhongkui Tan, Hua Xiang, Qing Xu, Qian Fu | 2018-06-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997366 | Silicon oxide silicon nitride stack ion-assisted etch | Zhongkui Tan, Hua Xiang, Qing Xu, Qian Fu | 2018-06-12 |