| 10118263 |
Monolithic manifold mask and substrate concepts |
Andrew C. Lee, Christopher Pena |
2018-11-06 |
| 10115568 |
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring |
Alexei Marakhtanov, John Holland, Zhigang Chen, Felix Kozakevich, Kenneth Lucchesi |
2018-10-30 |
| 10049862 |
Chamber with vertical support stem for symmetric conductance and RF delivery |
Daniel Arthur Brown, John Holland, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more |
2018-08-14 |
| 10037869 |
Plasma processing devices having multi-port valve assemblies |
Daniel Arthur Brown, Leonard J. Sharpless, Allan K. Ronne, James E. Tappan |
2018-07-31 |
| 10014196 |
Wafer transport assembly with integrated buffers |
John Daugherty, David Trussell, Christopher Pena, Richard H. Gould, Klay Kunkel |
2018-07-03 |
| 9929028 |
Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs |
David Trussell, John Daugherty, Christopher Pena, Richard H. Gould, Klay Kunkel |
2018-03-27 |
