Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121688 | Electrostatic chuck with external flow adjustments for improved temperature distribution | Matthew J. Busche, Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Senh Thach, Masanori Ono | 2018-11-06 |
| 10079165 | Electrostatic chuck with independent zone cooling and reduced crosstalk | Vijay D. Parkhe | 2018-09-18 |
| 10026636 | Electrostatic chuck having reduced power loss | Jennifer Y. Sun | 2018-07-17 |
| 9991148 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Jason C. Della Rosa, Hamid Noorbakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. | 2018-06-05 |
| 9948214 | High temperature electrostatic chuck with real-time heat zone regulating capability | Dmitry Lubomirsky, Jennifer Y. Sun, Sehn Thach, Xing Lin, Michael D. Willwerth | 2018-04-17 |
| 9875923 | Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Matthew J. Busche, Masanori Ono, Senh Thach | 2018-01-23 |