Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090247 | Semiconductor device formed by wet etch removal of Ru selective to other metals | Benjamin D. Briggs, David L. Rath | 2018-10-02 |
| 10062560 | Method of cleaning semiconductor device | Kevin J. Ryan, Shariq Siddiqui, Frank W. Mont | 2018-08-28 |
| 10002831 | Selective and non-selective barrier layer wet removal | Benjamin D. Briggs, Elbert E. Huang, Raghuveer R. Patlolla, David L. Rath, Hosadurga Shobha | 2018-06-19 |
| 9984923 | Barrier layers in trenches and vias | Benjamin D. Briggs, Lawrence A. Clevenger, Michael Rizzolo, Chih-Chao Yang | 2018-05-29 |
| 9947547 | Environmentally green process and composition for cobalt wet etch | Frank W. Mont, Shariq Siddiqui, Randolph F. Knarr | 2018-04-17 |
| 9881833 | Barrier planarization for interconnect metallization | Benjamin D. Briggs, Elbert E. Huang, Takeshi Nogami, Raghuveer R. Patlolla, David L. Rath | 2018-01-30 |
| 9859218 | Selective surface modification of interconnect structures | Raghuveer R. Patlolla, Roger A. Quon, Chih-Chao Yang | 2018-01-02 |