Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818598 | Substrate cleaning method and recording medium | Yuki Yoshida, Hisashi Kawano, Masami Yamashita, Itaru Kanno, Kenji Mochida +1 more | 2017-11-14 |
| 9764345 | Substrate processing apparatus and nozzle cleaning method | Yoshihiro Kai, Yoshinori Ikeda, Kazuyoshi Shinohara, Tetsuya Oda, Satoru Tanaka +1 more | 2017-09-19 |
| 9768039 | Substrate processing apparatus | Kazuhiro Aiura, Norihiro Ito, Hidetoshi Nakao, Kazuyoshi Shinohara, Satoru Tanaka +1 more | 2017-09-19 |