Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852933 | Substrate processing apparatus, substrate processing method, and recording medium | — | 2017-12-26 |
| 9773687 | Liquid processing apparatus | Terufumi Wakiyama, Jiro Higashijima | 2017-09-26 |
| 9768010 | Liquid treatment apparatus | Kazuhiro Aiura, Naoki Shindo, Yosuke Hachiya | 2017-09-19 |
| 9768039 | Substrate processing apparatus | Kazuhiro Aiura, Hidetoshi Nakao, Kazuyoshi Shinohara, Satoru Tanaka, Yuki Yoshida +1 more | 2017-09-19 |
| 9711380 | Liquid processing apparatus, liquid processing method and storage medium | Takashi Nagai | 2017-07-18 |
| 9691602 | Liquid process apparatus and liquid process method | Kazuhiro Aiura, Naoki Shindo, Yosuke Hachiya, Takashi Nagai | 2017-06-27 |
| 9640383 | Liquid treatment apparatus and liquid treatment method | Kazuhiro Aiura, Takashi Nagai | 2017-05-02 |
| 9614188 | Organic electroluminescent element and lighting device | Takashi ANJIKI | 2017-04-04 |