Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818626 | Substrate processing apparatus and substrate processing method | Yoshifumi Amano, Eiichiro Okamoto, Yuki Ito | 2017-11-14 |
| 9793142 | Substrate processing apparatus and substrate processing method | Yoshifumi Amano, Eiichiro Okamoto, Yuki Ito | 2017-10-17 |
| 9773687 | Liquid processing apparatus | Terufumi Wakiyama, Norihiro Ito | 2017-09-26 |