Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818626 | Substrate processing apparatus and substrate processing method | Jiro Higashijima, Yoshifumi Amano, Yuki Ito | 2017-11-14 |
| 9793142 | Substrate processing apparatus and substrate processing method | Jiro Higashijima, Yoshifumi Amano, Yuki Ito | 2017-10-17 |
| 9782807 | Substrate processing system, method for controlling substrate processing system, and storage medium | Yoshifumi Amano, Yuki Ito | 2017-10-10 |
| 9536761 | Substrate liquid processing apparatus | Yoshifumi Amano, Yuki Ito | 2017-01-03 |