Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9768039 | Substrate processing apparatus | Kazuhiro Aiura, Norihiro Ito, Kazuyoshi Shinohara, Satoru Tanaka, Yuki Yoshida +1 more | 2017-09-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9768039 | Substrate processing apparatus | Kazuhiro Aiura, Norihiro Ito, Kazuyoshi Shinohara, Satoru Tanaka, Yuki Yoshida +1 more | 2017-09-19 |